Surface and Near Surface Analysis by Ion Beam Techniques

The specific aspects of Ion Beam Analysis (IBA) for near surface and thin film characterization are discussed. The application of IBA techniques in material science, surface physics, thin film deposition and crystal growth has been investigated. In this paper, we report some new obtained results in Van De Graaff Laboratory on the different samples after installation of Channeling and Micro-Beam systems. The aim of this paper is description of the IBA techniques capabilities in material analysis.