Analytical solutions of the azimuthal deviation of a polarizer and an analyzer by polarizer-sample-analyzer ellipsometry

The analytical solutions of the azimuthal deviation of a polarizer and an analyzer were obtained by polarizer-sample-analyzer ellipsometry with a three-intensity measurement technique. By performing two sets of this three-intensity measurement with the polarizerʹs azimuth set at 45° and at -45°, we were able to obtain a set of ellipsometric parameters free from the azimuthal deviations of the polarizer and the analyzer.