Optical broadband monitoring of conventional and ion processes

This contribution is focused on applications of spectroscopic methods for the precise control of deposition processes. Besides a monochromator system with a moving grating for the deep ultraviolet/vacuum ultraviolet (DUV/VUV) spectral range, two approaches are presented for online spectrophotometers with CCD arrays. The conventional spectrophotometer is considered for the operator-assisted deposition of fluoride coatings applied in the DUV/VUV range. The concepts with CCD arrays are combined with an advanced software tool for an automatic production of optical coatings. An ion-assisted deposition process and ion-beam sputtering are considered for rapid manufacturing of complex layer systems in the visible and near-infrared spectral ranges. The present contribution summarizes and discusses the major aspects of the described combinations.