Title of article
High-performance coatings for micromechanical mirrors
Author/Authors
Yang، Minghong نويسنده , , Gatto، Alexandre نويسنده , , Kaiser، Norbert نويسنده , , Heber، Jorg نويسنده , , Schmidt، Jan Uwe نويسنده , , Sandner، Thilo نويسنده , , Schenk، Harald نويسنده , , Lakner، Hubert نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2006
Pages
-1601
From page
1602
To page
0
Abstract
High-performance coatings for micromechanical mirrors were developed. The high-reflective metal systems can be integrated into the technology of MOEMS, such as spatial light modulators and microscanning mirrors from the near-infrared down to the vacuum-ultraviolet spectral regions. The reported metal designs permit high optical performances to be merged with suitable mechanical properties and fitting complementary metal-oxide semiconductor compatibility.
Keywords
atmospheric VOC , isoprene , Sulphur dioxide , isoprene oxidation , inhibition of S(IV) autoxidation
Journal title
Applied Optics
Serial Year
2006
Journal title
Applied Optics
Record number
75136
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