Author/Authors :
Yang، Minghong نويسنده , , Gatto، Alexandre نويسنده , , Kaiser، Norbert نويسنده , , Heber، Jorg نويسنده , , Schmidt، Jan Uwe نويسنده , , Sandner، Thilo نويسنده , , Schenk، Harald نويسنده , , Lakner، Hubert نويسنده ,
Abstract :
High-performance coatings for micromechanical mirrors were developed. The high-reflective metal systems can be integrated into the technology of MOEMS, such as spatial light modulators and microscanning mirrors from the near-infrared down to the vacuum-ultraviolet spectral regions. The reported metal designs permit high optical performances to be merged with suitable mechanical properties and fitting complementary metal-oxide semiconductor compatibility.
Keywords :
atmospheric VOC , isoprene , Sulphur dioxide , isoprene oxidation , inhibition of S(IV) autoxidation
