Title of article :
Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system
Author/Authors :
Keem، Taeho نويسنده , , Gonda، Satoshi نويسنده , , Misumi، Ichiko نويسنده , , Huang، Qianxiang نويسنده , , Kurosawa، Tomizo نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Pages :
-3491
From page :
3492
To page :
0
Abstract :
The cyclic error of a homodyne interferometer is caused mainly by phase mixing due to the imperfection of polarizing optical components such as polarizing beam splitters. In Appl. Opt. 43, 2443 (2004), we concentrated on the relationship between these imperfect optical characteristics and the cyclic error and found the preamplifier-gains condition for removing the cyclic error. Here we demonstrate the cyclic error correction method experimentally and show that the method can be applied in real time. We obtained 0.04-nm cyclic errors, with a standard deviation above 5 (mu)m.
Keywords :
General , Equipment , Techniques , Measurement , Interferometry , Metrological instrumentation , instrumentation , Metrology
Journal title :
Applied Optics
Serial Year :
2005
Journal title :
Applied Optics
Record number :
75963
Link To Document :
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