Contactless Method for Studying the Parameters of the Electrode Region of an RF Discharge

A nonintrusive contactless method for studying the parameters of the electrode region of a capacitive low-pressure RF discharge is proposed. The method involves the measurements of dc and ac electric voltages at the elements of the discharge circuit with subsequent calculations of both the electrostatic potential drop across the electrode sheath and the sheath thickness by using relations derived in the paper. For a collisionless electrode sheath, the density of the positive-ion current onto the electrode and the charge density at the plasma boundary are determined. It is shown experimentally that the method can be successfully applied to studying capacitive RF discharges with inner or outer electrodes.