Cross-sectional nanoindentation for copper adhesion characterization in blanket and patterned interconnect structures: experiments and three-dimensional FEM modeling

Cross-sectional nanoindentation (CSN) is a recent method for adhesion measurement of nanoscale thin films in ultra-large scale integrated circuits. In the case of ductile thin films, plastic deformation during the test and complex geometry of delaminated areas require 3D finite element modeling (FEM) for adhesion energy calculation. In this paper the adhesion of various copper (Cu) films on blanket and patterned structures is studied byCSNtest. The experimental procedure and qualitative analysis of the test are presented in detail. Crack propagation is studied on blanket and patterned substrates. The dimensions of delaminated blisters are measured by scanning electron microscope (SEM) for each sample. Results show that a geometrical ratio can be used to give a quick and qualitative measurement of adhesion. A new 3D FEM model is then proposed to assess quantitative analysis of CSN test. The deformation energy of Cu blister is calculated for each sample. The mechanical properties of the Cu films required for numerical calculations are measured by instrumented indentation. The influence on thesemeasurements of the evolution of the Cu deformation with penetration depth is discussed in detail with the aid of 2D numerical simulation. The results of numerical modeling correlate well with qualitative evaluation of adhesion.