Abstract :
Secondary Ion Mass Spectrometry (SIMS) is a mature surface analysis technique with a vast
range of applications in Materials Science. In this review article the SIMS process is described,
the fundamental SIMS equations are derived and the main terminology is explained. The issue
of quantification is addressed. The various modes of SIMS analysis including static SIMS,
imaging SIMS, depth profiling SIMS and three-dimensional (3D) SIMS are discussed as are
specialized analysis strategies such as the imaging of shallow bevels and cross-sections and
reverse side analysis. SIMS is shown to be a useful sample preparation tool based on ion beam
milling (with SIMS and Scanning Electron Microscopy (SEM) analysis providing end-point
detection). The case studies shown illustrate the application of SIMS to several important
materials including semiconductors, superconductors, glass, stainless steel, micrometeoroids,
solid oxide fuel cell components, museum artifacts, aerospace alloys and biomaterials.
Strategies for introducing SIMS into undergraduate education and thus increasing awareness
are described. Finally some informed guesses are made as to the future directions of SIMS.
C 2006 Springer Science + Business Media, Inc.
