GaN single crystals grown on HVPE seeds in alkaline supercritical ammonia

Ammonothermal growth (synthesis in supercritical (sc) ammonia fluid) has the promise of producing large low defect gallium nitride crystals through the application of techniques similar to those used in hydrothermal growth. Retrograde solubility of GaN greater than 5% by weight using group I amides as mineralizers is demonstrated in high nickel content autoclaves at pressures of one to three kilobars and temperatures between 300 to 600◦C. The above conditions were optimized to grow single-crystal GaN at rates up to 40 μm per day on one cm2 seeds. Gallium nitride Hydride Vapor Phase Epitaxy (HVPE) seeds are placed in the higher temperature zone below the nutrient basket employing the same configurations used in reverse gradient hydrothermal growth of berlinite (AlPO4). GaN single crystals grown by the ammonothermal technique were characterized by X-ray diffraction, photoluminescence, scanning electron microscopy (SEM), atomic force microscopy (AFM), and chemical etching. The nitrogen-terminated face tends to exhibita flatter surface morphology than the gallium-terminated face, which is made up of a series of hexagonal columns. Major impurities in the crystal include potassium from the mineralizer, metals from the autoclave, and oxygen. The nitrogen-terminated face incorporated a lower level of metallic impurities in comparison with the gallium-terminated face. Finally, several process phenomena such as ammonia decomposition, parasitic nucleation of GaN on the autoclave walls, impurity incorporation, and defect generation in single-crystal GaN layers grown on HVPE seeds are identified and their possible mechanisms are discussed. C 2006 Springer Science + Business Media, Inc.