Fabrication of nanostructures with different iron concentration by electron beam induced deposition with a mixture gas of iron carbonyl and ferrocene, and their magnetic properties

Electron beam induced deposition (EBID) with a mixture gas of iron carbonyl and ferrocene was carried out to fabricate nanostructures with different iron concentrations in a chamber of a scanning electron microscope. The iron concentration was controlled by changing the ratio of partial pressure of iron carbonyl and ferrocene. Electron holography observation revealed that the remanent magnetic flux density Br values of the nanostructures were also changed depending on the iron concentration.