Abstract :
Electrospraying utilises electrical forces for
liquid atomisation. Droplets obtained by this method
are highly charged to a fraction of the Rayleigh limit.
The advantage of electrospraying is that the droplets
can be extremely small, down to the order of 10’s
nanometres, and the charge and size of the droplets can
be controlled to some extent be electrical means.
Motion of the charged droplets can be controlled by
electric field. The deposition efficiency of the charged
spray on an object is usually higher than that for
uncharged droplets. Electrospray is, or potentially can
be applied to many processes in industry and in scientific
instruments manufacturing. The paper reviews electrospray
methods and devices, including liquid metal ion
sources, used for thin film deposition. This technique is
applied in modern material technologies, microelectronics,
micromachining, and nanotechnology.
