Title of article
Effects of the deposition and patterning processes of the top electrode on the ferroelectric properties of Pt/Pb(Zr,Ti)O3/Pt thin film capacitors
Author/Authors
Eun Gu Lee، نويسنده , , JAE-GAB LEE، نويسنده , , Sun Jae Kim، نويسنده ,
Issue Information
دوهفته نامه با شماره پیاپی سال 2007
Pages
6
From page
3772
To page
3777
Abstract
The deformation in the hysteresis loop of
Pt/PZT/Pt thin film capacitors due to deposition and
patterning processes of the top electrode has been
investigated. The PZT film was aged during the
deposition of the top electrode and was positively
poled during reactive ion etching (RIE) of the top
electrode. The PZT film having sputtered top electrode
was very sensitive to the RIE process. The film with a
thinner top electrode showed less initial switching
polarization due to less compressive stress, but better
fatigue characteristics due to an enhanced partial
switching region.
Journal title
Journal of Materials Science
Serial Year
2007
Journal title
Journal of Materials Science
Record number
832836
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