• Title of article

    Effects of the deposition and patterning processes of the top electrode on the ferroelectric properties of Pt/Pb(Zr,Ti)O3/Pt thin film capacitors

  • Author/Authors

    Eun Gu Lee، نويسنده , , JAE-GAB LEE، نويسنده , , Sun Jae Kim، نويسنده ,

  • Issue Information
    دوهفته نامه با شماره پیاپی سال 2007
  • Pages
    6
  • From page
    3772
  • To page
    3777
  • Abstract
    The deformation in the hysteresis loop of Pt/PZT/Pt thin film capacitors due to deposition and patterning processes of the top electrode has been investigated. The PZT film was aged during the deposition of the top electrode and was positively poled during reactive ion etching (RIE) of the top electrode. The PZT film having sputtered top electrode was very sensitive to the RIE process. The film with a thinner top electrode showed less initial switching polarization due to less compressive stress, but better fatigue characteristics due to an enhanced partial switching region.
  • Journal title
    Journal of Materials Science
  • Serial Year
    2007
  • Journal title
    Journal of Materials Science
  • Record number

    832836