Abstract :
Thin films of silicon can be grown by glow-discharge decomposition of silane and hydrogen. As the hydrogen dilution
increases, a transition from amorphous to microcrystalline phase takes place. The regime below and above this
edge has been found to be most suitable for making high efficiency amorphous and microcrystalline solar cells. In this
paper I outline the status of material research, cell performance and manufacturing of thin film silicon grown near the
edge of amorphous to microcrystalline transition.
2004 Elsevier Ltd. All rights reserved.
