Abstract :
We report transmittance and conductivity measurements of aluminum-doped zinc oxide films grown by atomic layer deposition. The
results show that the films have 80–90% transmittance in the visible region and good transmittance in the infrared. To our knowledge,
this is the first time that the transmittance of aluminum-doped zinc oxide is reported to extend beyond 2500–5000 nm. Following annealing,
an optimal sheet resistance of 25 X/h was obtained for a 575 nm thick film with a carrier density of 2.4 1020 cm 3 without compromising
the transmittance in the visible regime.
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