Author/Authors :
Nurubeyli، Zulfuqar Kamil نويسنده Institute of Physics, Azerbaijan National Academy of Sciences, Baku, Azerbaijan , , Nuriyev، Kamil Zulfugar نويسنده , , Qurbanov، Kamil Bakhtiyar نويسنده Institute of Physics, Azerbaijan National Academy of Sciences, Baku, Azerbaijan , , Nurubeyli، Tarana Kamil نويسنده ,
Abstract :
Despite a number of benefits of Secondary Ion
Mass-Spectrometry (SIMS), the studies of solids by this
method involves disadvantage associated with a spread of
energies of ions ejected from the sample surface. This
leads to a limitation of analytical characteristics of the
SIMS. This paper presents the results of development and
testing time of flight mass spectrometer with axial
symmetric electric field, with the ability to triple focus of
ion (by angle, energy, and coordinates) with the high
specifications of the developed instrument were obtained.
