Passivation layers for reduced total dose effects and ELDRS in linear bipolar devices

It is shown that final chip passivation layers can have a significant impact on total dose hardness. A number of final chip passivation layers are evaluated to identify films that mitigate enhanced low-dose-rate sensitivity (ELDRS) in National Semiconductor Corporationʹs linear bipolar technologies. It is shown that devices fabricated with either a low temperature oxide or a tetraethyl ortho silicate passivation do not exhibit significant ELDRS effects up to 100 krad(SiO/sub 2/). Passivation studies on CMOS SRAMs suggest that it is unlikely that the passivation layers (or processing tools) are acting as a new source of hydrogen, which could drift or diffuse into the oxide and increase ELDRS sensitivity. Instead, it is possible that the passivation layers affect the mechanical stress in the oxide, which may affect oxide trap properties and possibly the release and mobility of hydrogen. Correlations between mechanical stress induced by the passivation layers and radiation degradation are discussed.