Contribution of SiO/sub 2/ in neutron-induced SEU in SRAMs

The aim of this work is to show the contribution of nuclear events occurring with oxygen nuclei in SRAM-oxide such as SiO/sub 2/ and emphasize that they are likely to increase the soft error rate by about several tens of percent. Recoil energies are calculated with a dedicated subroutine, which accounts for elastic and nonelastic reactions in the 5-150-MeV energy range. SEU cross sections are evaluated using the criterion of critical energy deposited in a cubic sensitive volume.