on microbeam diagnostics with scintillators for application of deep ithography with particles

e have developed two techniques for microscopic particle beam imaging and dose easurement, both based on scintillators. One employs a scintillating fiberoptic plate o display the two-dimensional beam transversal profile, the other makes use of a mall scintillator optically coupled to a compact photomultiplier. We have proved the ossibility of detection from single beam particles up to several nanoampere currents. oth the devices are successfully being exploited for on-line control of low and very ow intensity proton beams, down to a beam size of <50 (mu)m in the framework f deep lithography with protons oriented to the production of optical icrocomponents.