Design & Analysis of RF MEMS capacitive switches manufacturing process on the coplanar waveguide

ABSTRACT: In this paper, we design and simulate RF MEMS switch in suspension bridge mode. We chose the transmission line of type CPW. First, by using TX LINE2003 software, we have designed and calculated the dimensions of transmission line for having characteristic impedance 50?. We have chosen the substrate made of silicon, conductor of transmission line of made of cooper, dielectric layer made of SiO2, and upper electrode (bridge) made of aluminum. We simulate the manufacturing process of the switch in Intellisuite software. We have chosen 3 forms for upper electrode (bridge) format and we performed thermo-electromechanical analysis for each case. In each case, we measure the pull-down voltage and compare them with each other. According to results, it is shown that form a ,is more relevant for choosing the bridge.