Title of article
Integrating nonelectronic components into electronic Microsystems
Author/Authors
Murari، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
-35
From page
36
To page
0
Abstract
Microelectromechanical systems will soon usher in a new technological renaissance. Just as ICs brought the pocket calculator, PC, and video games, MEMS will provide a new set of products and markets. The author presents the state of the art, from inertial sensors to microfluidic devices.
Keywords
Application , photonics
Journal title
IEEE MICRO
Serial Year
2003
Journal title
IEEE MICRO
Record number
90222
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