• Title of article

    Silicon planar technology for single-photon optical detectors

  • Author/Authors

    F.، Zappa, نويسنده , , S.، Lombardo, نويسنده , , E.، Sciacca, نويسنده , , A.C.، Giudice, نويسنده , , D.، Sanfilippo, نويسنده , , R.، Consentino, نويسنده , , C.، Di Franco, نويسنده , , M.، Ghioni, نويسنده , , G.، Fallica, نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2003
  • Pages
    -917
  • From page
    918
  • To page
    0
  • Abstract
    Design and fabrication of single photon avalanche detector (SPAD) in planar technology is reported. Device design and critical issues in the technology are discussed. Experimental test procedures are described for darkcounting rate, afterpulsing probability, photon timing resolution, and quantum detection efficiency. Low-noise detectors are obtained, with dark counting rates down to 10 c/s for devices with 10 (mu)m diameter, down to 1 kc/s for 50 (mu)m diameter. The technology is suitable for monolithic integration of SPAD detectors and associated circuits.
  • Keywords
    iterative method , noniterative method , boundary-layer equation , Laminar flow , Turbulent flow , nonlinear parabolic partial-differential equation
  • Journal title
    IEEE TRANSACTIONS ON ELECTRON DEVICES
  • Serial Year
    2003
  • Journal title
    IEEE TRANSACTIONS ON ELECTRON DEVICES
  • Record number

    95679