Title of article :
Photothermal surface-micromachined actuators
Author/Authors :
Y.B.، Gianchandani, نويسنده , , A.D.، Oliver, نويسنده , , S.R.، Vigil, نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2003
Abstract :
We report on the optical actuation of surface micromachines. Optical energy is absorbed by the micromachines and converted to heat, which causes differential thermal expansion between different parts of the device and up to 12 (mu)m of displacement. The polysilicon actuators are homogenous and electrically isolated.
Keywords :
boundary-layer equation , Laminar flow , Turbulent flow , iterative method , noniterative method , nonlinear parabolic partial-differential equation
Journal title :
IEEE TRANSACTIONS ON ELECTRON DEVICES
Journal title :
IEEE TRANSACTIONS ON ELECTRON DEVICES
