Low-cost microoptical modules for MCM level optical interconnections

A multichannel free-space microoptical module for dense MCM-level optical interconnections has been designed and fabricated. Extensive modeling proves that the module is scalable with a potential for multi-Tb/s.cm/sup 2/ aggregate bit rate capacity while alignment and fabrication tolerances are compatible with present-day mass replication techniques. The microoptical module is an assembly of refractive lenslet-arrays and a high-quality microprism. Both components are prototyped using deep lithography with protons and are monolithically integrated using a vacuum casting replication technique. The resulting 16-channel high opticalgrade plastic module shows optical transfer efficiencies of 46% and inter-channel cross talks as low as -22 dB, sufficient to establish workable multichannel MCM-level interconnections. This microoptical module was used in a feasibility demonstrator to establish intra-chip optical interconnections on a 0.6 (mu)m CMOS optoelectronic field programmable gate array. This optoelectronic chip combines fully functional digital logic, driver and receiver circuitry and flipchipped VCSEL and detector arrays. With this test-vehicle multichannel on-chip datacommunication has been achieved for the first time to our knowledge. The bit rate per channel was limited to 10 Mb/s because of the limited speed of the chip tester.