Title of article
In situ ellipsometric diagnostics for controlled growth of metal oxides with surface chemical reactions
Author/Authors
Hiroshi Kumagai، نويسنده , , Koichi Toyoda، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1994
Pages
6
From page
481
To page
486
Abstract
In situ diagnostics for controlled growth of metal oxides such as aluminum oxide with surface chemical reactions was successfully conducted with a spectroscopic ellipsometer. It was found that the self-limiting growth of aluminum oxide films at room temperature was clearly observed with alternate dosing of binary vapors of trimethylaluminum and hydrogen peroxide.
Journal title
Applied Surface Science
Serial Year
1994
Journal title
Applied Surface Science
Record number
989845
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