Title of article :
Slow positron implantation spectroscopy of edge-defined film-fed growth silicon
Author/Authors :
PG Coleman، نويسنده , , MARJORIE E. BLOSS، نويسنده , , S. Setzler، نويسنده , , S. LaShell، نويسنده , , Gordon Davies، نويسنده , , W.D. Sawyer، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1995
Pages :
4
From page :
276
To page :
279
Abstract :
An effective diffusion length L+ of 90±10 nm has been measured for thermalised positrons in a number of samples of edge-defined film-fed growth (EFG) silicon at room temperature. This value of L+ is some three times shorter than that observed in undefected Si, whereas the characteristic annihilation lineshape parameters associated with EFG and undefected Si are indistinguishable. These results imply that (a) positron diffusion in EFG Si is hampered by shallow trapping by defects - probably substitutional C - present at a concentration of about 100 ppm, and (b) no opendashvolume defects were detected.
Journal title :
Applied Surface Science
Serial Year :
1995
Journal title :
Applied Surface Science
Record number :
989955
Link To Document :
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