Title of article
Measurement of oxide thickness using a variable-energy positron beam
Author/Authors
T.C. Leung، نويسنده , , P.J. Simpson، نويسنده , , A. Atkinson، نويسنده , , I.V. Mitchell، نويسنده , , Peter J. Schultz، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1995
Pages
3
From page
292
To page
294
Abstract
Thermally grown, wet silicon oxides were studied using a variable-energy positron beam. Positron data were modelled without prior knowledge of the film thicknesses, as a “blind” test, to evaluate our ability to interpret the positron data. Good agreement was found between film thicknesses obtained by positron annihilation, time-resolved reflectivity, and nuclear reaction analysis.
Journal title
Applied Surface Science
Serial Year
1995
Journal title
Applied Surface Science
Record number
989958
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