Author/Authors :
R. Teghil، نويسنده , , L.D. Alessio، نويسنده , , G. De Maria، نويسنده , , P. D. Ferro، نويسنده ,
Abstract :
The pulsed-laser deposition technique has been employed to obtain TaC films deposited on graphite substrates. X-ray diffraction, SEM and XPS analysis have been utilized to characterize films obtained by varying the temperature of the substrate up to 1000 K. Considerations about the plume emission were made on the basis of plasma analysis by a LAMMA system and OMA spectra and from geometrical parametrizations of the plume escape.
