Author/Authors :
E.W. Kreutz، نويسنده , , H. Frerichs، نويسنده , , M. Mertin، نويسنده , , D.A. Wesner، نويسنده , , W. Pfleging، نويسنده ,
Abstract :
The tailoring of chemical, morphological, and mechanical surface properties with laser radiation is described on the basis of the understanding and control of photon-matter interaction. The removal of matter by thermal and non-thermal processes including etching, the deposition of multilayer thin films, and the photoresistless patterning by direct and indirect processing techniques are illustrated by examples.
