Germanium-containing coatings by IR laser-induced decomposition of ethoxy(trimethyl) germane and tetramethylgermane

Different germanium-based materials are produced from ethoxy(trimethyl)germane (ETG) and tetramethylgermane (TMG) by CO2 laser radiation. The CO2 laser SF6-photosensitized decomposition of TMG affords germanium, the infrared multiphoton decomposition of ETG yields a material which is rich in Ge and contains small amounts of oxygen and carbon, and the SF6-photosensitized decomposition of ETG yields a deposit containing Ge and substantial quantities of C and O.