Hydrogen adsorption induced phase transitions on Si(100)-c(8 × 8): temperature dependence studied by LEED

Phase transitions on a clean reconstructed Si(100)-c(8 × 8) surface induced by atomic hydrogen adsorption at different temperatures have been studied using Low Energy Electron Diffraction (LEED). It has been found that: at liquid nitrogen temperature, successive dosing of atomic hydrogen causes the surface to go through a series of phase transitions from c(8 × 8) to (4 × 1)-H to (2 × 1)-H and finally to (1 × 1)-H. At different high temperatures from 700°C to room temperature, successive saturation doses of atomic hydrogen can induce phase transitions from c(8 × 8) to c(4 × 4)-H to (2 × 1)-H and finally to (1 × 1)-H.