Fluorine doped tin oxide films from spray pyrolysis of stannous fluoride solutions

Transparent conducting films of fluorine doped tin oxide were deposited using spray pyrolysis. The spray solution was tin (II) fluoride in methanol with or without addition of acid. Film thickness, growth rates and polycrystal grain size increased with deposition time, substrate temperature and amount of hydrochloric acid added to the deposition solution. The crystallite orientations in the films depended also on those variables as well as on solution concentration.