Spectroscopic study of the microwave plasma enhanced pulsed laser deposition for Y1Ba2Cu3O7−x superconducting thin films

Microwave plasma enhanced pulsed laser deposition (PE-PLD) technique has successfully in-situ synthesized the epitaxial-like high quality Y1Ba2Cu3O7−x superconducting thin films. It has remarkably improved the filmsʹ surface morphology with fine grain, high dense and mirror-smooth. The PE-PLD emission spectra showed abundant active atomic oxygen produced and greatly enhanced in emission intensities of YBCO species sustaining to the substrate surface of extended deposition distance (85 mm), that is believed to explain the improvement of deposition kinetics and surface morphology of YBCO superconducting thin films. The effects of microwave power, laser energy and oxygen pressure on the enhancement were investigated.