Author/Authors :
M. Geiger، نويسنده , , W. Becker، نويسنده , , T. Rebhan، نويسنده , , J. Hutfless، نويسنده , , N. Lutz، نويسنده ,
Abstract :
The efficiency of XeCl excimer laser ablation of ceramics was increased by one order of magnitude due to special processing conditions. Increasing either the temperature of the material beyond 1000°C or using a water film on the workpiece surface enables ablation rates of more than 2 μm/pulse for Al2O3. The interaction phenomena are studied using process diagnostics.
