Title of article
Increase of efficiency for the XeCl excimer laser ablation of ceramics
Author/Authors
M. Geiger، نويسنده , , W. Becker، نويسنده , , T. Rebhan، نويسنده , , J. Hutfless، نويسنده , , N. Lutz، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1996
Pages
7
From page
309
To page
315
Abstract
The efficiency of XeCl excimer laser ablation of ceramics was increased by one order of magnitude due to special processing conditions. Increasing either the temperature of the material beyond 1000°C or using a water film on the workpiece surface enables ablation rates of more than 2 μm/pulse for Al2O3. The interaction phenomena are studied using process diagnostics.
Journal title
Applied Surface Science
Serial Year
1996
Journal title
Applied Surface Science
Record number
990590
Link To Document