Author/Authors :
Narumi Inoue، نويسنده , , Shigeru Kashiwabara، نويسنده , , Shigetada Toshima، نويسنده , , Ryozo Fujimoto، نويسنده ,
Abstract :
Ta2O5 thin-film with a very low density of droplets was obtained on Si(110) substrate by off-axis excimer laser deposition method. The quality of the films was investigated as a function of the deposition pressure and the substrate position. The film with the thickness of 3000 Å showed a dielectric constant ε = 26.
