True Auger spectral shapes (standards)

A novel cylindrical mirror analyzer (CMA) has been developed to obtain standard spectra in Auger electron spectroscopy. The spectra were obtained absolutely by using an electrometer. The measured energy resolution is 0.24% and the transmission was estimated to be 5.6%. The primary energy and current were set with an accuracy within ±0.01% and ±1%, respectively. The sweep energy was directly measured with a precise high voltage divider. Thus the spectra can be calibrated with an accuracy of 0.1 eV. Auger spectra of nickel (the round robin sample) were obtained. Total range of spectra are reported for the primary accelerating voltages ranging 1.0–5000.0 V. We can quantitatively identify every spectrum except a broad peak at 18.5 eV. The L-loss spectrum was observed as a critical bend of background rather than a peak. The LVV Auger peaks which are very small then usually having been missed were obtained as well. Very small fractions of carbon contamination on the Ni showed atomic like KLL (triplet or quintuplet) transitions.