Hydrogen adsorption induced surface reconstructions on Si(113) studied by LEED

Surface reconstructions on Si(113) induced by dissociated hydrogen adsorption have been studied using low energy electron diffraction (LEED). It has been found that: (1) at 300 K and 80 K temperatures, with the increase of hydrogen coverage on the surface, the (3 × 1) phase transferred continuously into a hydrogen saturated (1 × 1)-2H phase; (2) flashing of the (1 × 1)-2H surface at about 1100°C resulted in a complete new phase of (1 × 3) and further annealing of the sample at 1250°C gave back the starting surface of (3 × 1); (3) saturated hydrogen adsorption at a sample temperature of 700°C resulted in a stable new phase of (1 × 2)-H and further saturation doses of hydrogen at other temperatures below 700°C did not change the (1 × 2) LEED pattern; (4) annealing of the (1 × 2)-H surface in the same manner as (2) gave similar results.