Photodesorption studies on thin film sol-gel systems

The thermal conversion and photoconversion of thin metal (Ti, Fe) alkoxide films, spin-deposited from chemically modified precursor solutions, into oxide films is studied with the aid of desorption spectra. The conversion process takes place in three distinct temperature steps, characterized by typical chemical processes. Photoirradiation with the aid of an excimer lamp (172 nm) enhances some chemical reactions directly. Hydrolysis reactions are considered to be secondary reactions. The photodesorption characteristics are influenced by the nature of the central metal ion and by the nature of the alkoxy group.