Bistabilities in pyrolytic laser-CVD of silicon and carbon

In pyrolytic laser-CVD of silicon and carbon, bistable growth with a pronounced hysteresis was observed within certain regimes of scanning velocities and laser powers. In order to study the influence of changes in heat conductivities and activation energy, we have deposited onto different substrate materials silicon from SiH4 and Si2H6 and carbon from CH4, C2H2, and C2H4.