Analysis and control of surface degenerated layers grown on thin Pb(Zr, Ti)O3 films

Chemical states and structures of thin degenerated layers grown on the surface of PZT(Pb(Zr, Ti)O3) films are investigated by X-ray photo-electron spectroscopy (XPS) and RHEED (reflection of high energy electron diffraction). A careful study of the Ti 2p peak in the XPS spectrum reveals that PZT films easily absorb moisture from the air and decompose into their component oxides. This creates a degenerated layer that can be removed by the nitric acid treatment. After this treatment, the PZT surface becomes more resistant to humidity than the original surface.