Title of article
Laser-induced etching of tungsten
Author/Authors
K Piglmayer، نويسنده , , H Schieche، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1997
Pages
5
From page
184
To page
188
Abstract
Laser-induced thermal etching of tungsten was performed in WF6 atmosphere. Thin tungsten layers on quartz have been patterned by direct writing of etch-grooves, using the 514.5 nm line of an Ar+ laser.
Journal title
Applied Surface Science
Serial Year
1997
Journal title
Applied Surface Science
Record number
991353
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