Pulsed laser deposition of particulate-free thin films using a curved magnetic filter

The transport of the plasma, produced by pulsed laser ablation, through a curved magnetic filter was investigated with the aim of depositing particulate-free thin films. The plasma output of a 90° magnetic particulate filter was monitored, using a Langmuir probe, as a function of guiding magnetic field and duct wall bias voltage. Copper and carbon targets were used and the time of flight spectra of the ions at the input and the output were measured. A thin film of copper was deposited and examined using scanning electron microscopy. The film was found to be free of particulates.