Electron-beam-induced deposition of carbonaceous microstructures using scanning electron microscopy

Scanning electron microscopy (SEM) was utilized for deposition of carbonaceous microstructures. Conic-, wire- and square-shaped structures were fabricated with various scanning modes. A narrow carbonaceous wire with a width of 30 nm was obtained at an electron-beam current of 15 pA. The conic-structure was successfully applied to a cantilever of an atomic force microscope (AFM) and a planar resolution was extremely improved. Furthermore, the square-shaped structure was also employed as the insulator in a metal-insulator-metal (MIM) diode and a clear non-linear I-V characteristic was observed at room temperature.