Dependence of electrical resistivity on surface topography of MBE-grown Pt film

Surface topography of MBE-grown Pt film was investigated with scanning tunneling microscopy. On the other hand, electrical resistivity of the Pt film in Pt/Cu/Si specimen was measured using a proposed analytical model. Comparing the electrical resistivity change with the surface topography change, dependence of electrical resistivity on surface topography was clearly demonstrated.