Subsurface modification and relative optical density of synthetic diamond

The results of optical absorption analysis for the synthetic diamond (type Ib) modified by the molecular hydrogen ion with 40 keV, 6.3 × 1016 H/cm2, at room temperature, showed that the increase of optical density of the modified layer (∼ 140 nm) in the UV-VIS region resulted from the point defects generated by ion collisions. The position-sensitive spectrophotometer is useful for the characterization of optical inhomogeneity of the type Ib diamond and heavy damaged-surface layer on a homojunction diamond substrate.