Abstract :
This paper presents the synthesis and the characterisation of various chromium carbide compounds. Thin Cr23C6 films
were deposited by reactive sputtering while Cr7C3 films were formed by the carburisation of chromium films in a CH4rH2
atmosphere. Cr C powders were synthesised from various precursors Cr, CrN, Cr O.by reaction with CH rH at high x y 2 3 4 2
temperature. The samples were characterised by AES, XRD and electron diffraction. The effects of the experimental
parameters gas composition, temperature, reaction time.on the purity, the phase formed and the composition of the product
of reaction are examined and discussed. q1997 Elsevier Science B.V
