Laser cleaning of surface contaminants

Laser cleaning effect can be produced on a surface using pulsed laser irradiation, with pulse duration typically 1 to 100 ns, fluence typically tens to hundreds of mJrcm2, and wavelengths typically in the 200 to 300 nm range. A thin liquid film can be used to enhance the removal efficiency of small particulates; this is called ‘steam laser cleaning’. A manufacturingworthy tool that can provide both steam laser cleaning as well as dry laser cleaning is built and tested successfully. The basic mechanism of steam laser cleaning is studied. q1998 Elsevier Science B.V.