Pulsed laser deposition: analysis and deposition of SmBaCuO films

Composition and time evolution of the gas plume were investigated during a PLD of SmBaCuO thin films. Optical emission spectroscopy was employed for investigating the laser-induced plasma plume. The mean velocity of ions has been estimated to be slower when the experiment is performed in the presence of a buffer gas. Sm-based thin films produced were morphologically characterized by SEM analysis. q1998 Elsevier Science B.V.