Abstract :
TiN, Ti1yxAlxN and ZrN films were deposited by electron-beam- assisted dc magnetron sputtering. X-ray diffraction
showed different degrees of texture, depending on substrate bias, temperature and composition. In TiN films deposited with
a high bias, microstructure changes were evidenced from lattice parameter trends, attributable to Ar inclusions. Ti1yxAlxN
cubic solid solutions showed an average xs0.10. In ZrN films, a rhombohedrally-distorted phase is present, besides the
cubic one. q1998 Elsevier Science B.V. All rights reserved.
