Abstract :
Scanning force microscopy (SFM) was used to study the sputter cones resulting from the 5 keV Ne+ bombardment of an InP (100) surface. Atomic force microscopy, force modulation microscopy (FMM) and phase detection microscopy (PDM) images allow to distinguish between sputter cones and substrate on the basis of topography, local elasticity, adhesion and viscoelastic properties. FMM and PDM clearly indicate that the sputter conesʹ composition is different from that of the substrate.
