Title of article :
Reaction products in light-induced dry etching of GaAs with Cl2 and wavelengths around 120 nm
Author/Authors :
M.V. Dobrotvorskaya، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1998
Pages :
7
From page :
331
To page :
337
Journal title :
Applied Surface Science
Serial Year :
1998
Journal title :
Applied Surface Science
Record number :
992884
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=992884
